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It reduces the amount of water intake and drainage used in the semiconductor / liquid crystal manufacturing process.
Stable operation facilitates operation management and maintenance.
[Filtration] [Recovery] [Separation] [Concentration] [Purification]
Option
- Filtrate tank
- Two-stage concentration unit
- Filter cleaning chemical injection unit
- Clean room compatible unit
- Heat exchange unit
Features
By filtering and collecting the wastewater, the amount of wastewater can be drastically reduced.
- 99.9% or more of the filtered liquid can be expected to be recovered from the DC processed wastewater.
- 99.5% or more of the filtered liquid can be expected to be recovered from BG processed wastewater.
- 99% or more of the filtrate can be expected to be recovered from CMP wastewater.
By using the filtrate as the raw water of the pure water device, the load on the pure water device can be reduced.
By circulating water, the amount of water intake and drainage can be drastically reduced.
There are no consumables and running costs can be reduced.
There is no damage to the filter, which makes operation management easier.
Delivery example
| Application | Silicon wafer DC processing Wastewater recovery |
|---|---|
| Model | 7M3-2S3P |
| Filter | MBX3-1020-0.1 (Membrane pore size: 0.1 μm) |
| Filtration area | 14.7m2 |
| Processing amount | 5.5m3 / h |
| Wet contact material | SUS304 (inner and outer surface pickling |
| Weight | 3200 kg (operating weight) |
| Ancillary equipment |
|
Main application
- BG processed wastewater, DC processed wastewater, CMP wastewater
- Polishing drainage for glass lenses
- Purification and concentration recovery of electronic pastes and slurries
Specification
| Main wastewater permeation flux (FLUX) | Membrane pore size | Permeation flux (l / m2h) |
|---|---|---|
| DC processing drainage for glass/lenses | 0.2 μm | 400-600 |
| DC processing wastewater for silicon/gully arsenic wafers | 100nm | 300-500 |
| BG processing wastewater for silicon/gully arsenic wafers | 100nm | 200-400 |
| CMP (oxide film) wastewater | 50nm | 50-100 |
| CMP (metal) drainage | 50nm | 50-100 |
We will design according to the customer's specifications, so please contact us.
